Facilities
Facilities
Cleanroom Nanofabrication Facility
TMI’s cleanroom is a 3,000 square feet facility, class 100 used primarily for lithography processes and class 1,000 for fabrication, etching and materials growth, and testing. A wide array of materials deposition tools are available including e-beam and sputtering systems, thermal evaporation systems in gloveboxes, and Langmuir-Blodgett trough. Located in the Faulkner Nanotechnology Building on the 4th floor, the space provides ample room for materials research across a wide range of materials classes.
J.A. Wollam M2000 Spectroscopic Ellipsometer
Contact: Dr. Raluca Gearba
Location: FNT 4.106
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Kurt J Lesker Nano36 Thermal Deposition System
Contact: Dr. Raluca Gearba
Location: FNT 4.106
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Oxford Instruments Plasma Lab 80+ PECVD and Etching
Contact: Dr. Raluca Gearba
Location: FNT 4.106
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Quorum Technologies Critical Point Drier
Contact: Dr. Raluca Gearba
Location: FNT 4.106
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Zeiss Axioscope 2 MAT Optical Microscope
Contact: Dr. Raluca Gearba
Location: FNT 4.106
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Electrical Characterization Instrumentation
Contact: Dr. Raluca Gearba
Location: FNT 4.102