Cleanroom Nanofabrication Facility

TMI’s cleanroom is a 3,000 square feet facility, class 100 used primarily for lithography processes and class 1,000 for fabrication, etching and materials growth, and testing. A wide array of materials deposition tools are available including e-beam and sputtering systems, thermal evaporation systems in gloveboxes, and Langmuir-Blodgett trough. Located in the Faulkner Nanotechnology Building on the 4th floor, the space provides ample room for materials research across a wide range of materials classes.

Photo of Cleanroom Nanofabrication Facility

AMOD Thermal Deposition System

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

HMDS YES OVEN

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Vacuum Ovens

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Contact Angle Goniometer

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Cooke e-beam and Sputtering System

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Dektak 6M Stylus Profilometer

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Denton Thermal Evaporator

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Disco 321 Wafer Dicing Saw

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Aixtrom Black Magic

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Fuljifilm DMP-2800 Dimatix Printer

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

J.A. Wollam M2000 Spectroscopic Ellipsometer

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

KSV Langmuir-Blodgett Trough

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Laurell Technologies Spincoater I

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Laurell Technologies Spincoater II

Contact:
Location: EER 6.626

View Details
Photo of Cleanroom Nanofabrication Facility

March Plasma CS170IF RIE Etching System

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Kurt J Lesker Nano36 Thermal Deposition System

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Oxford Instruments Plasma Lab 80+ PECVD and Etching

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

PVD75 e-beam and Sputtering System

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Quorum Technologies Critical Point Drier

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Samco RIE-1C Reactive Ion Etcher

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Suss MA6 Mask Aligner

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

West Bond Wire Bonder

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Zeiss Axioscope 2 MAT Optical Microscope

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

KLA P-7 Stylus Profilometer

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Work Bench for Corporate Users

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

Electrical Characterization Instrumentation

Contact:
Location: FNT 4.102

View Details
Photo of Cleanroom Nanofabrication Facility

Acids Hood

Contact:
Location: FNT 4.106

View Details
Photo of Cleanroom Nanofabrication Facility

HF Hood

Contact:
Location: FNT 4.106

View Details