Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Instrument Capabilities

The R50 Four-Point Probe (4PP) system measures sheet resistance, resistivity, and film thickness of conductive and semiconductive materials over a 10-decade resistance range (1 mΩ to 200 MΩ). The system utilizes KLA's dual measurement technique, measuring voltage across multiple pins to improve measurement accuracy compared to conventional four-point probe systems.

Key features:

• Supports sample mapping on substrates up to 150 mm in diameter with a 100 × 100 mm automated XY travel range and customizable mapping patterns.
• Features 60 mm of Z-axis travel with coarse and fine height adjustment and programmable approach speed to accommodate a wide variety of sample sizes and thicknesses.
• Automatically generates maps of sheet resistance, resistivity, or film thickness, with the ability to calculate film thickness from known resistivity or vice versa.
• Includes three interchangeable probe heads optimized for:
  • General-purpose measurements (1 mm spacing, 100 μm tip radius)
  • High-resistance and ion-implanted surfaces (1 mm spacing, 200 μm tip radius)
  • Metal thin films (1 mm spacing, 40 μm tip radius)
• Equipped with a traceable resistor reference set for routine system verification and calibration.
• Ti 4PP Qualifier Wafer available (Nominal Rs = 4 Ohms/sq)

Fees and Policies

• UT Users: $20/hour
• Higher Education/State Agencies: $90/hour
• Corporate/External Users: $95/hour

Traning

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.