Equipment Type:

Cleanroom Instrumentation

Metrology

Spectroscopy

Instrument Capabilities

The J.A. Woollam M-2000D Spectroscopic Ellipsometer is a high-speed, non-destructive optical characterization system designed for measuring thin-film thickness and optical properties. With a broad spectral range and flexible measurement capabilities, the system is suitable for thin-film characterization, thickness uniformity mapping, and time-dependent or in-situ measurements. It supports both large-area scanning and focused measurements for detailed characterization of samples and patterned structures.

Features

• Spectral range: 193–1650 nm
• Thickness measurement range: Up to 10 μm, depending on the sample
• Large-area scanning mode
• Time-dependent measurement mode
• Beam size: 4 mm; at the sample, the beam is elliptical and its size depends on the angle of incidence
• Beam size with focusing probes: 300 μm
• Beam size with focusing probes: 300 microns

Supporting Materials

• Database for refractive indexes.

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.