Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Information the Equipment Can Provide

The AMOD PVD system can be used to deposit a wide range of materials including metals and organic materials. The AMOD is a resistive thermal evaporation system. The system has six sources available. The process is controlled using quartz rate sensors.

Features

• The system operation is fully controlled by software
• Recipe based advanced multi-layer deposition control
• Sequential or co-deposition of materials
• Stainless steel isolation shields help to protect sources from cross contamination
• The system is integrated into MBraun glovebox system. The system access can be performed from both the inside of the glovebox or the outside

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.