Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Instrument Capabilities

The AMOD PVD system is a resistive thermal evaporation system capable of depositing a wide range of materials, including metals and organic materials. The system is equipped with six evaporation sources, allowing for the deposition of multiple materials without requiring frequent source changes. Deposition rates and film thickness are monitored and controlled using quartz crystal rate sensors, providing precise control over the deposition process.

Key Features:

• The system operation is fully controlled by software
• Recipe based advanced multi-layer deposition control
• Sequential or co-deposition of materials
• Stainless steel isolation shields help to protect sources from cross contamination
• The system is integrated into MBraun glovebox system. The system access can be performed from both the inside of the glovebox or the outside

Fees and Policies

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Please contact Dr. Raluca Gearba to schedule a training session.