Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Instrument Capabilities

The Nano36 thermal deposition system from Kurt J. Lesker enables thermal deposition of metals onto substrates up to 150 mm in diameter.

Key Features:

• Automated process control: KJL eKLipse software with a graphical recipe builder.
• Deposition sources: Two thermal sources for co-deposition and four sources for sequential deposition.
• Source characteristics: DC power supply rated up to 12 V or 400 A, with a maximum applied power of 2 kW.
• Shutters and shielding: Substrate and source shutters with cross-contamination shields.
• Substrate rotation: Up to 20 rpm.
• Thickness monitoring: Two crystal sensors with controller-based deposition rate and film thickness control.
• System base pressure: 5.0 × 10⁻⁶ Torr.
• Film uniformity: <8%.

Fees and Policies

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.