Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Instrument Capabilities

The Nano36 thermal deposition system from Kurt J. Lesker enables thermal deposition of metals onto substrates up to 150 mm in diameter.

Characteristics:

• Automated process control: KJL eKLipse software with a graphical recipe builder.
• Deposition sources: Two thermal sources for co-deposition and four sources for sequential deposition.
• Source characteristics: DC power supply rated up to 12 V or 400 A, with a maximum applied power of 2 kW.
• Shutters and shielding: Substrate and source shutters with cross-contamination shields.
• Substrate rotation: Up to 20 rpm.
• Thickness monitoring: Two crystal sensors with controller-based deposition rate and film thickness control.
• System base pressure: 5.0 × 10⁻⁶ Torr.
• Film uniformity: <8%.

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.