Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Plasma Etching and Material Growth

Instrument Capabilities

The Aixtrom Black Magic is a plasma-enhanced chemical vapor deposition (PECVD) system dedicated to growing graphene. It can accommodate multiple samples or a single 4-inch wafer. Available gases include Ar, N₂, CH₄, and H₂. Optimized recipes on copper have been characterized to provide excellent monolayer coverage with minimal areas of bilayer formation.

Fees and Policies

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.