Equipment Type:

Cleanroom Instrumentation

Electrical Characterization Instrumentation

Electronic and Optoelectronic Testing

Instrument Capabilities

The setup includes:

• The Karl Suss PM 5 Probe Station
• A small four-point probe (4PP) setup for measuring resistivity of materials
• A Tektronix 4200A-SCS Semiconductor Parameter Analyzer

The Karl Suss PM5 Probe Station consists of a stereo microscope, a 6-inch vacuum chuck which allows single chips as well as up to 6-inch wafers to be probed, 4 micromanipulators, and a light tight enclosure. It can be coupled to various test equipment for device testing such as I-V and C-V measurements.

The Keithley 4200A-SCS Semiconductor Parameter Analyzer is an integrated electrical characterization platform used to measure the electrical properties of semiconductor devices and materials. It combines precision source-measure capabilities with capacitance-voltage measurements to characterize transistors, diodes, solar cells, MEMS devices, sensors, advanced materials, and electronic components.

Features:

• Four Source-Measure Units (SMUs) and one Capacitance Voltage Unit (CVU). DC
• DC I-V range: 100 fA to 1 A and 0.1 μV to 210V
• CVIV Multi-switch module: allows users to perform both I-V and C-V measurements on the same device without manually reconnecting the cables.
• Clarius data acquisition software: 400 user-modifiable pre-configured tests

4PP characteristics:

• The distance between the probes is 0.0625 inches=1.5875 mm
• Pressure on each probe: 45g
• Probe material: Tungsten Carbide

Fees and Policies

• UT Users: $20/hour
• Higher Education/State Agencies: $90/hour
• Corporate/External Users: $95/hour

Traning

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.