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Laurell Technologies Spincoater II

Contact: Dr. Raluca Gearba
Location: EER 6.626

Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Information the Equipment Can Provide

The Laurell Spincoater (WS-650Mz-23NPPB) is located in one of the fume hoods in EER 6.626. The spincoater is dedicated to processing of E-beam resists and other polymeric materials.

System Specifications:

  • Speeds: 100-12,000 RPMs
  • Substrate size: up to 150 mm round substrates and 125 mm square substrates, thickness: 0.1 to 1 mm
  • Wafer Fragment Adapter for 10 – 50 mm substrate fragments
  • Microscope Slide adapter

Fees and Policies

  • UT Users: $30/hour
  • Higher Education/State Agencies: $51/hour
  • Corporate/External Users: $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.