Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Information the Equipment Can Provide

The Laurell Spincoater (WS-650Mz-23NPPB) is located in one of the fume hoods in EER 6.626. The spincoater is dedicated to processing of E-beam resists and other polymeric materials.

System Specifications:

• Speeds: 100-12,000 RPMs
• Substrate size: up to 150 mm round substrates and 125 mm square substrates, thickness: 0.1 to 1 mm
• Wafer Fragment Adapter for 10 – 50 mm substrate fragments
• Microscope Slide adapter

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.