Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Instrument Capabilities

Several ovens are available in TMI's cleanroom. These ovens are primarily used for wafer dehydration, photoresist soft baking, post-exposure baking, and thermal annealing processes. They provide precise temperature control and uniform heating to ensure repeatable processing, improve photoresist adhesion, remove residual moisture, and support a wide range of microfabrication and materials research applications.

Isotemp Vacuum Oven, Model 281A, Fisher Scientific (Vac_Oven_2 in FBS)

• Vacuum range: 0 to 30 in.Hg
• Dial-in temperatures up to 280°C
• Temperature control +/-1°C
• Dimensions (DxWxH interior:11.5X10X10 in.)

Isotemp Vacuum Oven, Model 280A, Fisher Scientific (Vac_Oven_1 in FBS)

• This oven is mostly used for photoresist baking
• Vacuum range: 0 to 30 in.Hg
• Vacuum range: 0 to 30 in.Hg
• Temperature control +/-2°C
• Dimensions (DxWxH interior:11.125X9.5X9.5 in.)

Fees and Policies

Cleanroom Entry fee

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

There are no fees associated with using the Vacuum Ovens, except the cleanroom entry fee.

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.