Photo of Cleanroom Instrumentation

HF Hood

Contact: Dr. Raluca Gearba
Location: FNT 4.106

Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Information the Equipment Can Provide

Hydrofluoric acid is a clear, colorless liquid which is an extremely dangerous material in all forms, including vapors and solutions.

Chemicals approved for use in the TMI’s cleanroom HF hood:

  • Buffered oxide etchant (BOE), Buffer HF improved, solution UN2817, Transcene (mixture of ammonium hydrogen difluoride, hydrofluoric acid and water)
  • Hydrofluoric acid (48 wt. %), 7667-39-3

Usage of any other mixtures with HF will have to be approved by the facility manager.

Supporting Documents:

Fees and Policies

There are no fees associated with using the HF Hood, except the cleanroom entry fee.

Do not attempt to use the HF hood without prior training.

Hydrofluoric acid-based processes can be performed only between 8:00 AM to 5:00 PM, Monday through Friday.

Always work in pairs, reserve the HF hood in FBS and start timer.

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.