Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Information the Equipment Can Provide

Hydrofluoric acid is a clear, colorless liquid which is an extremely dangerous material in all forms, including vapors and solutions.

Chemicals approved for use in the TMI’s cleanroom HF hood:

• Buffered oxide etchant (BOE), Buffer HF improved, solution UN2817, Transcene (mixture of ammonium hydrogen difluoride, hydrofluoric acid and water)
• Hydrofluoric acid (48 wt. %), 7667-39-3

Usage of any other mixtures with HF will have to be approved by the facility manager.

Supporting Documents:

• SOP for using HF
• HF MSDS
• Buffered Oxide Etchant (BOE) MSDS

Fees and Policies

Cleanroom Entry fee:

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

There are no fees associated with using the HF Hood, except the cleanroom entry fee.

Do not attempt to use the HF hood without prior training.

Hydrofluoric acid-based processes can be performed only between 8:00 AM to 5:00 PM, Monday through Friday.

Always work in pairs, reserve the HF hood in FBS and start timer.

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.