Equipment Type:

Cleanroom Instrumentation

Metrology

Microscopy/Surface Analysis

Surface Analysis

Instrument Capabilities

The Dektak 6M is a film step-height measurement tool capable of measuring steps from 260 microns down to 10 nm. The system can also be used to profile surface topography and measure surface roughness in the nanometer range. The system is currently equipped with a 25-micron-radius, high-aspect-ratio stylus

Maximum acceptable sample size is 6 inches.

Fees and Policies

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Cleanroom Facility

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Users should register for the required in-person training course through UTLearn.