Equipment Type:

Cleanroom Instrumentation

Metrology

Microscopy/Surface Analysis

Surface Analysis

Instrument Capabilities

The Dektak 6M is a film step-height measurement tool capable of measuring steps from 260 microns down to 10 nm. The system can also be used to profile surface topography and measure surface roughness in the nanometer range. The system is currently equipped with a 25-micron-radius, high-aspect-ratio stylus

Maximum acceptable sample size is 6 inches.

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.