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Photo of Microscopy/Surface Analysis

VersaProbe4 X-ray Photoelectron Spectrometer

Contact: Dr. Hugo Celio
Location: EER 6.636

Equipment Type:

Microscopy/Surface Analysis

Surface Analysis

  • This instrument is a highly versatile, highly automated, multi-technique instrument, with a monochromatic, micro-focused X-ray source and 180° hemispherical electron energy analyzer optimized  for high sensitivity spatially resolved chemical state analysis. 
  • The VersaProbe offers excellent micro-area spectroscopy performance with spot sizes between 7 and 300 mm and easily adjusted power. 
  • Available Ar Ion Cluster Gun  (2.5  to 20kV) for surface cleaning and depth profiling. 
  • The system is also equipped with ultraviolet photoelectron spectroscopy (UPS) and reflection energy loss spectroscopy (REELS) .
  • The system also provides Auger Electron Spectroscopy (AES) for imaging with better resolution than XPS ( 150 nm beam diameter). 

Key Features

  • Al and Zn/Mg (600W) X-ray sources
  • Cooling/heating stage: -140°C to 800 °C 
  • Depth resolution: 2 to 8 nm
  • Lateral resolution: 10 mm