Equipment Type:

Microscopy/Surface Analysis

Optical Profiles

Surface Analysis

Instrument Capabilities

The Keyence VK-X1100 Optical Profilometer is a high-resolution, non-contact laser scanning confocal microscope used to characterize the three-dimensional surface topography and morphology of materials. The system provides quantitative measurements of surface roughness, step heights, patterned features, and thin-film thickness, making it particularly useful for evaluating microfabrication, lithography, etching, and thin-film deposition processes.

Key features:

• 1024 × 768 pixel image resolution
• 404 nm laser for high-resolution surface measurements
• Fast scanning: measurement time of approximately [X] seconds per scan
• Lateral resolution: approximately 120 nm
• Z-resolution: approximately 6–8 nm
• Multiple Z-direction measurement steps for accurate three-dimensional surface reconstruction
• Non-contact optical measurement, minimizing the risk of damaging delicate surfaces
• Suitable for measuring surface roughness, step heights, patterned features, and thin-film thickness
• Sample considerations: measurements can be affected at transitions between glass and highly reflective surfaces, which may require appropriate sample preparation or measurement conditions.

Fees and Policies

• UT Users: $23/hour
• Higher Education/State Agencies: $56/hour
• Corporate/External Users: $56/hour

Traning

Please contact Dr. Andrei Dolocan to schedule a training session.