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Scios 2HiVac Dual beam FIB/SEM System with EBL Capabilities

Contact: Dr. Raluca Gearba
Location: EER 0.756

Equipment Type:

Electron Microscopy

Nano and Micro Fabrication

TEM Sample Preparation

Information the Equipment Can Provide

The Scios 2 HiVac system from Fisher Scientific is a dual focused ion beam/scanning electron microscopy system.

  • High quality TEM sample preparation with Sidewinder HT FIB, Easylift, and AutoTEM
  • High quality and throughput subsurface and 3D Characterization.
  • High contrast UHR imaging with in-lense Trinity detection scheme
  • User Guidance for common DualBEam activities
  • Auto Slice and View 4 can is used for automated serial milling and imaging
  • 30Kev EBL system with NPGS

System Characteristics:

  • Stage: 110 x110 mm with 65 mm z-travel, 360° rotation, -15° to 90° tilt
  • Easy navigation: 6 megapixels Nav-Cam with 160 x105 mm field of view for on screen sample tracking
  • Large multi-purpose sample holder: 6 X 1/2-inch stubs, 3 x 1/2-inch stubs pre-tilted at 45°, 1 horizontal row holder slot, 1 pre-tilted row holder slot and 1 clamp holder
  • NICol SEM column with Shottky emitter source
    • Voltage: 200eV to 30 keV (20 eV landing with beam deceleration)
    • Current: 1 pA to 400nA
    • Resolution: 0.8 nm at 30keV in STEM, 1 nm at 30 k eV (in-lense detection),1.6 nm at 1 k eV (in-lense detection)
  • Ion Column:
    • Voltage: 500V to 30 kV
    • Current: 1.5pA to -65 nA in 15 steps
    • Resolution: 3 nm
  • Detectors:
    • Everhart-Thornley secondary electron detector (SED)
    • In-lens T1 and T2 detectors
    • ICE detector for secondary electron and ion detection
    • Retractable Directional Back Scatter detector
    • Retractable STEM 3+ detector
    • Micro Analysis detectors: 30 mm windowless EDS detector, WDS detector and EBSD
  • Carbon and Platinum deposition both the SEM and FIB
  • CryoCleaner and charge neutralizer
  • CryoMat for sample cooling up to -60°C
  • QuickLoader for sample transfer without breaking vacuum.

Fees and Policies

  • UT Users: $55/hour
  • Higher Education/State Agencies: $94/hour
  • Corporate/External Users: $165/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.