Equipment Type:

Electron Microscopy

Nano and Micro Fabrication

TEM Sample Preparation

Instrument Capabilities

The Scios 2 HiVac system from Fisher Scientific is a dual focused ion beam/scanning electron microscopy system.

• High quality TEM sample preparation with Sidewinder HT FIB, Easylift, and AutoTEM
• High quality and throughput subsurface and 3D Characterization.
• High contrast UHR imaging with in-lense Trinity detection scheme
• User Guidance for common DualBEam activities
• Auto Slice and View 4 can is used for automated serial milling and imaging
• 30Kev EBL system with NPGS

Key Features

• Stage: 110 × 110 mm stage with 65 mm Z-travel, 360° rotation, and −15° to +90° tilt.
• Easy navigation: 6-megapixel Nav-Cam with a 160 × 105 mm field of view for on-screen sample tracking and navigation.
• Large multi-purpose sample holder:
  • Six ½-inch stubs.
  • Three ½-inch stubs pre-tilted at 45°.
  • One horizontal row-holder slot.
  • One pre-tilted row-holder slot.
  • Two vertical row-holder slots.
• NICol SEM column: Equipped with a Schottky field-emission electron source.
  • Accelerating voltage: 200 eV–30 keV.
  • Landing energy down to approximately 20 eV using beam deceleration.
  • Beam current: 1 pA–400 nA.
  • Resolution: 0.8 nm at 30 keV in STEM mode.
  • Resolution: 1.0 nm at 30 keV using in-lens detection.
  • Resolution: 1.6 nm at 1 keV using in-lens detection.
• Low kV imaging modes:
  • Beam deceleration
  • Opti-plan: electrostatic lens
• Ion column:
  • Ion beam voltage: 500 V–30 kV.
  • Ion beam current: 1.5 pA–65 nA in 15 steps.
  • Ion beam resolution: approximately 3 nm.
• Electron and ion detectors:
  • Everhart–Thornley secondary electron detector (SED).
  • In-lens T1 and T2 detectors.
  • ICE detector for secondary electron and ion detection.
  • Retractable directional backscattered-electron detector.
  • Retractable STEM 3+ detector.
• Thermo Fisher Microanalysis suite: 100 mm² windowless EDS detector, WDS detector, and EBSD detector (Lumis) for elemental and crystallographic analysis.
• Gas-assisted deposition: Supports carbon and platinum deposition using both the SEM and FIB beams.
• EasyLift Nanomanipulator for TEM sample preparation. It also includes a cryo sleeve for TEM lamella preparation under cryogenic conditions.
• Cryogenic capabilities:
  • Leica cryo-stage: ~ -165°C
• Leica docking station for the Leica VCT500 transfer system. 

Fees and Policies

• UT Users: $60/hour
• Higher Education/State Agencies (Assisted): $248/hour
• Corporate/External Users (Assisted): $348/hour
• Higher Education/State Agencies (Unassisted): $111/hour
• Corporate/External Users (Unassisted): $172/hour

Traning

Users should register for the required in-person training course through UTLearn.

TMI: Basic training on SEM imaging and EDS mapping on the Scios Dual Beam
TMI: Fabrication and imaging of cross-sections on the Scios Dual Beam
TMI: Fabrication of cross-sectional TEM lamella on the Scios Dual Beam