Instrument Capabilities
The KLA P-7 is a high-precision contact surface profilometer used to quantitatively characterize surface topography and thin-film features. The system measures film thickness, step height, etch depth, and surface roughness by moving a stylus across the sample surface and recording changes in surface height.
The system is currently equipped with a 2.5 µm-radius stylus with a 60° cone angle, providing a balance between measurement sensitivity and the ability to characterize patterned and microfabricated structures.
Key features:
- Profiles are independent of sample type, allowing characterization of a wide range of materials and substrates
- Z-axis resolution: 5.7 Å
- Vertical measurement range: 0–327 µm with three selectable ranges:
- 0–13 µm
- 0–65 µm
- 0–327 µm
- Variable stylus force: 0.5–50 mg
- Maximum substrate thickness: 1 inch
- 6-inch diameter stage for wafer and sample handling
- Vacuum hold-down for secure positioning of substrates during measurement
- Motorized leveling for controlled sample alignment
- Manual sample rotation for measurement orientation and profile positioning
- 2.5 µm stylus tip radius
- 60° stylus cone angle
Fees and Policies
- UT Users: $35/hour
- Higher Education/State Agencies (Assisted): $92/hour
- Corporate/External Users (Assisted): $94/hour
- Higher Education/State Agencies (Unassisted): $64/hour
- Corporate/External Users (Unassisted): $65/hour
A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.
- UT Users $6
- Higher Education/State Agencies: $10
- Corporate/External Users: $10
Traning
Users should register for the required in-person training course through UTLearn.
