Equipment Type:

Cleanroom Instrumentation

Metrology

Microscopy/Surface Analysis

Instrument Capabilities

The KLA P-7 is a high-precision contact surface profilometer used to quantitatively characterize surface topography and thin-film features. The system measures film thickness, step height, etch depth, and surface roughness by moving a stylus across the sample surface and recording changes in surface height.
The system is currently equipped with a 2.5 µm-radius stylus with a 60° cone angle, providing a balance between measurement sensitivity and the ability to characterize patterned and microfabricated structures.

Key features:

• Profiles are independent of sample type, allowing characterization of a wide range of materials and substrates
• Z-axis resolution: 5.7 Å
• Vertical measurement range: 0–327 µm with three selectable ranges:
  • 0–13 µm
  • 0–65 µm
  • 0–327 µm
• Variable stylus force: 0.5–50 mg
• Maximum substrate thickness: 1 inch
• 6-inch diameter stage for wafer and sample handling
• Vacuum hold-down for secure positioning of substrates during measurement
• Motorized leveling for controlled sample alignment
• Manual sample rotation for measurement orientation and profile positioning
• 2.5 µm stylus tip radius
• 60° stylus cone angle

Fees and Policies

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Users should register for the required in-person training course through UTLearn.