Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Information the Equipment Can Provide

The AMOD Sputtering system is used to deposit various oxides and metals. The evaporation system is equipped with 2 RF deposition heads and e-beam capabilities. The process is controlled using quartz rate sensors.

Features

• Computer controlled system operation
• Base Pressure: 2 x 10-7 Torr achieved in 2 hours
• Recipe based advanced multi-layer deposition control
• Sequential or co-deposition of materials
• Stainless steel isolation shields help protect sources from cross contamination
• Offered sputtering targets: Al, ITO, Cr

Fees and Policies

• UT Users: $30/hour
• Higher Education/State Agencies: $51/hour
• Corporate/External Users: $65/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

Training Fees

• UT Users: $59
• Higher Education/State Agencies: $138
• Corporate/External Users: $138

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.