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AMOD Sputtering

Contact: Dr. Raluca Gearba
Location: FNT 4.106

Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Thin Film Fabrication

Information the Equipment Can Provide

The AMOD Sputtering system is used to deposit various oxides and metals. The evaporation system is equipped with 2 RF deposition heads and e-beam capabilities. The process is controlled using quartz rate sensors.


  • Computer controlled system operation
  • Base Pressure: 2 x 10-7 Torr achieved in 2 hours
  • Recipe based advanced multi-layer deposition control
  • Sequential or co-deposition of materials
  • Stainless steel isolation shields help protect sources from cross contamination
  • Offered sputtering targets: Al, ITO, Cr

Fees and Policies

  • UT Users: $31/hour
  • Higher Education/State Agencies: $54/hour
  • Corporate/External Users: $46/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.