Equipment: Laurell Technologies Spincoater

Description

The clean room spin coater is for spin coating of polymer materials for creating metal/polymer bilayers and spin coating of photoresist for patterning the photolithography process.

Features

• Speed: 100-8000 RPM.
• Can handle substrate sizes within a radius of 6” inch.

Location

CNM Cleanroom

FNT 4.106

Fees

$25.00 per hour for UT Austin users

$54.00 per hour for external university users

$65.00 per hour for corporate users

No charge when used in conjunction with Suss MA6 Mask Aligner or Raith50 Electron Beam Lithography System

Facility User Education

To become a user of this instrument please sign up for the next available NT201 facility user education class.  External/Corporate users must contact CNM to setup an account before attending facility user education classes.

Fee: $25.00

Contact

Dr. Joshua Bolinger

jcb2873@mail.utexas.edu

(512) 232-3694